JPH0444217Y2 - - Google Patents

Info

Publication number
JPH0444217Y2
JPH0444217Y2 JP1985153309U JP15330985U JPH0444217Y2 JP H0444217 Y2 JPH0444217 Y2 JP H0444217Y2 JP 1985153309 U JP1985153309 U JP 1985153309U JP 15330985 U JP15330985 U JP 15330985U JP H0444217 Y2 JPH0444217 Y2 JP H0444217Y2
Authority
JP
Japan
Prior art keywords
workpiece
spinner
solvent
coating liquid
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985153309U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6262869U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985153309U priority Critical patent/JPH0444217Y2/ja
Publication of JPS6262869U publication Critical patent/JPS6262869U/ja
Application granted granted Critical
Publication of JPH0444217Y2 publication Critical patent/JPH0444217Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1985153309U 1985-10-07 1985-10-07 Expired JPH0444217Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985153309U JPH0444217Y2 (en]) 1985-10-07 1985-10-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985153309U JPH0444217Y2 (en]) 1985-10-07 1985-10-07

Publications (2)

Publication Number Publication Date
JPS6262869U JPS6262869U (en]) 1987-04-18
JPH0444217Y2 true JPH0444217Y2 (en]) 1992-10-19

Family

ID=31072075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985153309U Expired JPH0444217Y2 (en]) 1985-10-07 1985-10-07

Country Status (1)

Country Link
JP (1) JPH0444217Y2 (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS636843A (ja) * 1986-06-26 1988-01-12 Dainippon Screen Mfg Co Ltd 基板現像処理方法
JP2767308B2 (ja) * 1990-01-25 1998-06-18 富士写真フイルム株式会社 光情報記録媒体の製造方法
JP5029486B2 (ja) 2008-05-13 2012-09-19 東京エレクトロン株式会社 塗布装置、塗布方法及び記憶媒体

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57201564A (en) * 1981-06-01 1982-12-10 Dainippon Printing Co Ltd Coating method
JPS6074775U (ja) * 1984-09-13 1985-05-25 大日本スクリーン製造株式会社 回転式表面処理装置

Also Published As

Publication number Publication date
JPS6262869U (en]) 1987-04-18

Similar Documents

Publication Publication Date Title
JPH0444216Y2 (en])
JP3241058B2 (ja) 回転式塗布装置及び回転式塗布方法
US3990462A (en) Substrate stripping and cleaning apparatus
US7247209B2 (en) Dual outlet nozzle for the combined edge bead removal and backside wash of spin coated wafers
JPH07256195A (ja) 回転式薬液処理装置
JPS61283126A (ja) 処理ステ−シヨン内壁の洗浄方法と装置
US20180117621A1 (en) Spin Dispenser Module Substrate Surface Protection System
JPH0444217Y2 (en])
JP2002143749A (ja) 回転塗布装置
JPH0441975Y2 (en])
JPH0441976Y2 (en])
JPH09122560A (ja) 回転式塗布装置
JPH05226242A (ja) 現像装置及び現像方法
JP4018232B2 (ja) スピン処理装置
JP2004050054A (ja) 基板処理装置の洗浄方法および基板処理装置
JP2557932Y2 (ja) ノズル洗浄機構付き薬液供給ノズル
JP4371337B2 (ja) 塗布ノズルの洗浄装置
JPS63204725A (ja) 半導体製造装置
JP2648124B2 (ja) 薬液塗布装置
JP2014157911A (ja) 回転塗布装置および該回転塗布装置の洗浄方法
JP2608136B2 (ja) 回転塗布装置
JPH0725256Y2 (ja) スピンナー装置
JPH04156974A (ja) スピンナ装置
JP2000331974A (ja) 基板回転処理装置
JP2003145014A (ja) 回転塗布装置